▶ 采用三轴式全自动误差补偿系统.
Adopting a three-axis fully automatic error compensation system.
▶双料盒模式+同时传载3片晶圆片.
Dual material box mode+simultaneous transfer of 3 wafers.
▶预对准采用非接触式，避免Wafer损坏和污染。
Prealignment is non-contact to avoid wafer damage and contamination.
▶多尺寸的规格夹具.
Multi sized specification fixtures.
